Understanding Surface Scatter Phenomena: A Linear Systems Formulation deals with surface scatter phenomena that continue to be an important issue in diverse areas of science and engineering in the 21st century. Scattering effects from microtopographic surface roughness are merely non-paraxial diffraction phenomena. After reviewing the historical ......
Diffraction and background-limited operation at room temperature is the ultimate goal of the infrared physicist. The achievement of this goal is strongly dependent on the hybridization technology utilized in bonding the IR focal plane array to the Si ROIC. To this end, this book describes a disruptive architecture in the field of hybridization ......
Survey investigations, with the end goal of monitoring the entire celestial sphere, have become a priority in astronomy. This book is the first monograph devoted to wide-field telescopes, intended to bridge the gap between astronomers and professional opticians. It emphasizes the deep connection between classical and new telescopes, as well as the ......
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references ......
This newest edition of Principles of Lithography reflects the continuing advancement of lithographic technology. In recent years, certain topics, such as line-edge roughness (LER), multi-electron-beam writers, and nonlinear overlay models, have become much more significant to practicing lithographers, and more extensive treatments are therefore ......
The early editions of Optical Scattering were dominated by the exploration of the relationship between roughness and scatter from optically smooth surfaces by developing the relationship between the surface statistics and the measured surface scatter in BRDF units. The upper limit roughness for using scatter measurement to calculate surface ......
Optical lithography is one of the key technologies in the fabrication of microchips. This book gives an account of modern lithography during the first half of the 2020s, when high-NA extreme-ultraviolet lithography (EUVL) was being introduced. Central to the book is a comprehensive description of the effects that impact the quality of the optical ......
Microwave photonics is a rapidly growing field that lies at the intersection of microwave engineering and optics. The integration of photonics and microwave engineering has opened up new possibilities for high-speed communication, radar and sensing systems, and signal processing applications. This book contains both the basic theory and the ......
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references ......
