In this second edition of Extreme Ultraviolet Lithography, coverage is maintained on the fundamental aspects of EUV lithographic technology for topics such as exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Lithography costs, which have often influenced areas of technical focus, are also ......
Exponential Explosions of Technology: Innovations That Changed the World by Joseph W. Goodman explores how technological progress across diverse fields has followed-and often still follows-exponential trajectories. It begins by explaining the mathematics and meaning of exponential growth, then traces the phenomenon through more than twenty major ......
This book is a guide to teaching optics and photonics through inquiry-based investigations that use inexpensive and easily found supplies. It is intended for anyone who is providing informal STEM education or community outreach. The investigations in this book are easy to modify and can also be used in a traditional classroom or in a homeschool ......
The proper selection of mediums in designing certain photonic components plays an important role in achieving on-demand electromagnetic behavior that can be exploited for on-demand applications. Configuring the medium itself significantly impacts the electromagnetic features of the design as a whole. Engineered mediums can be conceptualized by the ......
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references ......
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in ......
Computational optical imaging uses electromagnetic signals in the infrared, visible, ultraviolet, and x-ray wavelength ranges to characterize remote objects. This text explains how to create mathematical forward models describing tomographic, holographic, ptychographic, and photographic imaging systems. It describes image estimation algorithms, ......
This book describes the author's experience in the process of moving from child to scientist. Duncan T. Moore calls Greenler an "Ambassador for Science" and writes in the foreword that "he has done more than many Nobel Prize winners to bring the excitement of science and engineering to everyone." This book is a personal account that will be read ......
With Applications in Optical Wave Propagation and Imaging in Turbulence
The objective of this textbook is twofold-to introduce advanced novel mathematical techniques and then to use them to solve a variety of problems that may arise in various applications. The novel mathematical techniques, covered in Part I of the text, involve the use of generalized hypergeometric functions, including the Meijer G-function. We ......
